Three-axis MEMS accelerometer for automotive applications

STMicroelectronics, a world leader in MEMS, has introduced its first automotive-qualified three-axis MEMS accelerometer. The AIS326DQ 3-axes linear accelerometer is qualified to AEC-Q100 for automotive applications, fully leveraging its proven 200mm-wafer MEMS fabrication facility to deliver leading-edge MEMS technology at competitive prices for system integrators. The three-axis MEMS accelerometer is the first of a range of products spearheading ST’s strategy to bring economies of scale from its market-leading MEMS business in consumer to new automotive MEMS applications. The AIS326DQ may be used in non-safety automotive applications, such as anti-theft systems and inertial navigation, motion activated functions, tilt measurements, vibration monitoring and compensation, black boxes, and event recorders

The AIS326DQ is a three axes digital output accelerometer that includes a sensing element and an IC interface able to take the information from the sensing element and to provide the measured acceleration signals to the external world through an SPI serial interface. The accelerometer meets automotive-industry requirements for non-safety applications such as vehicle alarms, tracking and monitoring, black-box systems, seat controls, navigation support and antenna positioning. Its high flexibility and ruggedness also benefit industrial applications such as vibration monitoring in heavy-duty equipment, or shipping-container management and security.

Key performance advantages include user-selectable full-scale range of +/- 2g or +/- 6g in all three axes, wide temperature range from –40 to +105 degrees Celsius, and 10,000g shock survivability. The functionality of the device and the measured acceleration data is selectable and accessible through the SPI interface. The functions, the thresholds and the timing of the interrupt pin (INT) can be completely programmed by the user through the SPI interface.

Several features simplify design-in, including 3.3V single-supply operation, 1.8V-compatible I/Os, and an SPI/I2C serial digital output supporting direct connection to a microcontroller. With 12-bit resolution, the MEMS accelerometer can detect inclination changes as small as one-tenth of a degree. The AIS326DQ features a data-ready signal (RDY) which indicates when a new set of measured acceleration data is available thus simplifying data synchronization in digital system employing the device itself.

Further capabilities include a data-ready signal to simplify system synchronization, as well as user-configurable inertial wake-up, direction-detection and freefall-interrupt modes. The integrated IC interface is factory calibrated for sensitivity and zero-g level, allowing use without further calibration. An embedded self-test routine is also implemented, which can be activated at any time to verify correct functionality.

The sensing element, capable of detecting the acceleration, is manufactured using a dedicated process developed by ST to produce inertial sensors and actuators in silicon. The IC interface instead is manufactured using a CMOS process that allows high level of integration to design a dedicated circuit which is factory trimmed to better match the sensing. The MEMS accelerometer is available in plastic quad flat package no lead surface mount (QFPN) and it is specified over a temperature range extending from -40 °C to +105 °C.

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